Conjoined Rectangular Beam Shaped RF Micro-Electro-Mechanical System Switch for Wireless Applications
Keywords:
RF MEMS, pull-in voltage, electrostatic actuation, electromagnetic analysis, isolationAbstract
A conjoined rectangular shaped cantilever beam switch is designed to operate in the frequency range from 2 to 12 GHz. The proposed switch exhibits good RF characteristics with low pull-in voltage which makes it ideal for various wireless mobile applications. The switch is designed in terms of electrostatic actuation mechanism with the optimization of the beam gap, switch beam thickness, and low actuation voltage. The switch shows excellent RF characteristics, low actuation voltage using a simple cantilever beam structure over a reliable contact. The proposed design is investigated by using IntelliFab v8.7@ software for electromechanical and EM software for electromagnetic analysis. The developed RF-Microelectromechanical system (MEMS) switch was actuated with a very low pull-in voltage of 5V and the maximum Mises stress under actuated condition is 16.7012 MPa. Its insertion loss is -0.25 dB to -3.56 dB at 2 GHz to 12 GHz
and isolation is about -74.55 dB to -57.65 dB at 2 GHz to 12GHz.
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References
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